Skip to Content

Your Location Within Site:


Thin-film deposition of mixed-conducting ceramic membranes

TitleThin-film deposition of mixed-conducting ceramic membranes
Publication TypeJournal Article
Year of Publication2012
AuthorsSmith, G. D., Wu J. P., and Brown I. W. M.
JournalMaterials Science Forum
Volume700
Pagination63-66
ISSN02555476
ISBN Number9783037852637
KeywordsAluminum sheet, Anodic oxidation, Ceramic membranes, Cerium compounds, Conductive films, Deposition, Electron beam evaporation, Electron beams, Evaporation, Gadolinium, Membranes, Mixed-conducting oxide, Nanotechnology, Oxygen, Oxygen separation, Perovskite, Phase transitions, Physical vapour deposition, Porous anodic alumina, Substrates, Thin films, Vapor deposition, Yttrium alloys, Zirconia
Abstract Thin films of oxygen-conducting materials are expected to exhibit enhanced oxygen permeability, due to their reduced diffusion path. Two such materials, yttria-stabilised zirconia (YSZ) and ceria gadolinium oxide (CGO), were deposited onto anodic alumina substrates by electron beam evaporation of the parent materials. Continuous films 200-400 nm thick were characterised through SEM and XRD analysis. It was found that the substrate temperature during deposition strongly influenced the structure and stability of the films, with the original simple cubic structure being retained at deposition temperatures above 450 °C. Attempts to deposit thin films of a yttria-doped SrCoO 3-δ perovskite were unsuccessful, due to melting of the material during deposition and thermal diffusion into the substrate. © (2012) Trans Tech Publications, Switzerland.
URLhttp://www.scopus.com/inward/record.url?eid=2-s2.0-80053959927&partnerID=40&md5=44e3598fadb5172fa9ff78a36ed81524
DOI10.4028/www.scientific.net/MSF.700.63